BS IEC 62047-46:2025 PDF
Semiconductor devices. Micro-electromechanical devices - Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membrane
Открыть превью (PDF)Semiconductor devices. Micro-electromechanical devices - Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membraneНазвание (английский):
BS IEC 62047-46:2025
Semiconductor devices. Micro-electromechanical devices - Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membrane
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Дата публикации:
- 30 апреля 2025 г.
- ICS:
- 31.080.99
- SKU:
- BS IEC 62047-46:2025
