PD IEC TS 62876-3-2:2026 PDF

Nanomanufacturing. Reliability and durability assessment - Graphene. Ellipsometry measurement of graphene

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PD IEC TS 62876-3-2:2026

Nanomanufacturing. Reliability and durability assessment - Graphene. Ellipsometry measurement of graphene

Статус документа:: Действующий
Формат:: Электронный (PDF)
Дата публикации:: 30 апреля 2026 г.
ICS:: 07.120
SKU:: PD IEC TS 62876-3-2:2026

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Abstract

1 Scope This part of 62876 establishes a standardized method to determine volume fraction for graphene by ellipsometry. Thickness/composition measurements are evaluated by ellipsometry before and after the stability test. By model calculation, the volume fraction of graphene can be evaluated. Since the test method is non-destructive, it can be used to assess the reliability and durability of graphene films on production lines.

For graphene-capped copper for Cu interconnects in a semiconductor engineering, for example, the reliability and durability of the capping layer are evaluated. Gas sensors, gas barriers, transparent electrodes for solar cells, etc. are being researched and developed. This method is useful for non-destructive and quantitative evaluation of the volume fraction of graphene to assess the reliability and durability.

PD IEC TS 62876-3-2:2026 PDF

Abstract

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