BS EN ISO 14644-10:2013 PDF

Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration

Открыть превью (PDF)Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration

Название (английский):

BS EN ISO 14644-10:2013

Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration

Статус документа:

Отменён

Формат:

Электронный (PDF)

Дата публикации:

30 апреля 2013 г.

ICS:

13.040.35

Технический комитет:

CEN

SKU:

BS EN ISO 14644-10:2013