BS EN 62047-11:2013 PDF
Semiconductor devices. Micro-electromechanical devices - Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
ΠΠ°Π·Π²Π°Π½ΠΈΠ΅ (Π°Π½Π³Π»ΠΈΠΉΡΠΊΠΈΠΉ):
BS EN 62047-11:2013
Semiconductor devices. Micro-electromechanical devices - Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
- Π‘ΡΠ°ΡΡΡ Π΄ΠΎΠΊΡΠΌΠ΅Π½ΡΠ°:
- ΠΠ΅ΠΉΡΡΠ²ΡΡΡΠΈΠΉ
- Π€ΠΎΡΠΌΠ°Ρ:
- ΠΠ»Π΅ΠΊΡΡΠΎΠ½Π½ΡΠΉ (PDF)
- ΠΠ°ΡΠ° ΠΏΡΠ±Π»ΠΈΠΊΠ°ΡΠΈΠΈ:
- 31 ΠΎΠΊΡΡΠ±ΡΡ 2013 Π³.
- ICS:
- 31.080.99
- Π’Π΅Ρ Π½ΠΈΡΠ΅ΡΠΊΠΈΠΉ ΠΊΠΎΠΌΠΈΡΠ΅Ρ:
- CENELEC
- SKU:
- BS EN 62047-11:2013