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Overview ISO 25178-603:2013 specifies the metrological characteristics of non-contact phase‑shifting interferometric (PSI) microscopes used for areal surface texture and surface topography measuremen…
Overview ISO 25178-603:2025 is the ISO standard that specifies the design and metrological characteristics of non-contact phase shifting interferometry (PSI) instruments used for areal surface topogr…
Overview EN ISO 25178-603:2025 - titled "Geometrical product specifications (GPS) - Surface texture: Areal - Part 603" - defines the design and metrological characteristics of phase shifting interfer…
1 Scope This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric ( PSI ) profile and areal surface texture measuring microscopes.
