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Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of…

Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Determination…

Surface chemical analysis — Determination of lateral resolution and sharpness in beam based methods with a ra…

Overview ISO 18516:2019 specifies standardized methods to determine lateral resolution and sharpness for beam‑based surface chemical analysis techniques - covering spatial ranges from nanometres to m…