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1 Scope This part of ISO 14644 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment , process equipment , components and tools) for use in cleanrooms an…
1 Scope This document gives guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. Under consideration are…
Overview - ISO 14644-14:2016 and cleanroom equipment suitability ISO 14644-14:2016 specifies a standardized methodology to assess whether equipment (machinery, process tools, measuring devices, compo…
Overview ISO 14644-12:2018 specifies methods and requirements for monitoring air cleanliness in cleanrooms and associated controlled environments by nanoscale particle concentration. The standard cov…
Overview ISO 14644-17:2021 - "Cleanrooms and associated controlled environments - Part 17: Particle deposition rate applications" provides guidance on interpreting and applying measurements of partic…
Overview ISO 14644-3:2019, "Cleanrooms and associated controlled environments - Part 3: Test methods," specifies standardized test methods to evaluate the performance of cleanrooms, clean zones and s…
Overview ISO 14644-2:2015 defines minimum requirements for a monitoring plan to provide evidence of cleanroom and clean zone performance related to air cleanliness by particle concentration. It speci…
Overview ISO 14644-5:2025 (Cleanrooms and associated controlled environments - Part 5: Operations) defines requirements for establishing an Operations Control Programme (OCP) to maintain specified cl…
Overview ISO 14644-15:2026 is an international standard developed by ISO that focuses on the assessment of suitability for use of equipment and materials in cleanrooms and associated controlled envir…
Overview ISO 14644-15:2017 - "Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration" - provides…
Overview ISO 14644-14:2026, titled Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration, is an international…
Overview ISO 14644-9:2022 defines a standardized procedure for assessing surface cleanliness by particle concentration (SCP) in cleanrooms and associated controlled environments. It applies to all so…
1 Scope This part of ISO 14644 establishes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications. Recom…
Overview ISO 14644-16:2019 - Cleanrooms and associated controlled environments - Part 16: Energy efficiency in cleanrooms and separative devices - provides guidance and recommendations to optimize en…
Overview ISO 14644-13:2017 - "Cleanrooms and associated controlled environments - Part 13" provides guidance for cleaning solid surfaces in cleanrooms to achieve defined levels of surface cleanliness…
Overview ISO 14644-13:2026 is a critical international standard that provides guidelines for cleaning surfaces in cleanrooms and associated controlled environments to achieve specified levels of clea…
Overview SIST EN ISO 14644-13:2026 provides comprehensive guidelines for cleaning surfaces within cleanrooms and associated controlled environments. Developed by the European Committee for Standardiz…
Overview SIST EN ISO 14644-14:2026 is a European and International Standard developed by CEN and ISO for the assessment of equipment suitability in cleanrooms and controlled environments based on air…
Overview EN ISO 14644-14:2026 is a European and International Standard developed by CEN and ISO for the assessment of equipment suitability in cleanrooms and controlled environments based on airborne…
Overview EN ISO 14644-13:2026 provides comprehensive guidelines for cleaning surfaces within cleanrooms and associated controlled environments. Developed by the European Committee for Standardization…
Overview EN ISO 14644-5:2025 - Cleanrooms and associated controlled environments - Part 5: Operations (ISO 14644-5:2025) defines requirements for an Operations Control Programme (OCP) to ensure consi…
Overview EN ISO 14644-18:2023 - "Cleanrooms and associated controlled environments - Part 18: Assessment of suitability of consumables" provides guidance for assessing personal and non-personal consu…
Overview EN ISO 14644-4:2022 (ISO 14644-4:2022) - Cleanrooms and associated controlled environments - Part 4: Design, construction and start-up - specifies the process for creating, refurbishing or m…
Overview EN ISO 14644-8:2022 - Cleanrooms and associated controlled environments: Assessment of air cleanliness by chemical concentration (ACC) defines standard methods to assess and specify airborne…
Overview EN ISO 14644-9:2022 - Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration (ISO 14644-9:2022) - establishes a standardized…
Overview EN ISO 14644-10:2022 - "Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination" (CEN endorsement of ISO 14644-10:2022) defi…
Overview - EN ISO 14644-17:2021 (Particle deposition rate applications) EN ISO 14644-17:2021 is part of the ISO 14644 cleanroom series and provides guidance on using measurements of particle depositi…
Overview SIST EN ISO 14644-3:2020 (ISO 14644-3:2019, corrected 2020-06) specifies standardized test methods for assessing the performance of cleanrooms and associated controlled environments (clean z…
Overview EN ISO 14644-3:2019 (ISO 14644-3:2019, corrected 2020-06) specifies standardized test methods for assessing the performance of cleanrooms and associated controlled environments (clean zones)…
EN ISO 14644-16:2019 - Energy efficiency in cleanrooms and separative devices ### Overview EN ISO 14644-16:2019 provides guidance and recommendations to optimize energy use and maintain energy effici…
Overview EN ISO 14644-2:2015 - part of the ISO 14644 cleanroom series - specifies minimum requirements for a monitoring plan for cleanrooms and associated controlled environments. The standard focuse…
Overview EN ISO 14644-1:2015 - "Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration" (CEN adoption of ISO 14644-1:2015) defines how…
Overview - EN ISO 14644-7:2004 (Separative devices) EN ISO 14644-7:2004, published by CEN and identical to ISO 14644-7:2004, sets the minimum requirements for separative devices used with cleanrooms…
